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Extreme ultraviolet lithography
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#	Item
121	T403-medea[removed]:47 Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:12 Ultraviolet Physics Immersion lithography Extreme ultraviolet lithography Photolithography Extreme ultraviolet
122	T401-medea+ LO1[removed]:11 Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:10 Photolithography IMEC Physics Resist Ultraviolet Laser Extreme ultraviolet lithography Computational lithography Technology Electromagnetic radiation Microtechnology
123	PROJECT RESULT Lithography T404: Extreme UV lithography masks (EXTUMASK) Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:39:55 Ultraviolet Extreme ultraviolet Mask 45 nanometer Microtechnology Multiple patterning Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photomask
124	PROJECT RESULT Lithography T406: Extreme UV consortium for imaging technology (ExCITe) Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:39:59 Chemistry Multiple patterning Photolithography Extreme ultraviolet Photoresist Ultraviolet 32 nanometer Nanoimprint lithography 45 nanometer Materials science Electromagnetic radiation Extreme ultraviolet lithography
125	PROJECT PROFILE T409: Development and proof of concept for projection mask-less lithography (Projection-ML2) HIGH-SPEED Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:20 Photolithography Extreme ultraviolet lithography Nanolithography Microelectromechanical systems Lithography 45 nanometer SEMATECH Next-generation lithography Materials science Technology Microtechnology
126	Project result CT301 I Extreme UV lithography entry point technology development [EXEPT] The extreme ultra-violet (EUV) Add to Reading List Source URL: www.catrene.org Language: English - Date: 2013-09-04 08:46:13 Extreme ultraviolet lithography Immersion lithography Multiple patterning Extreme ultraviolet Photomask SUSS MicroTec Lithography 32 nanometer Ultraviolet Materials science Electromagnetic radiation Technology
127	ESS & LU Faculty of Science Seminar series on New Science Research Opportunities with MAXIV and ESS The Quintessence of X-Ray Microscopy Add to Reading List Source URL: europeanspallationsource.se Language: English - Date: 2013-08-27 07:59:11 Electromagnetic spectrum Microscopes Extreme ultraviolet lithography X-ray microscope Extreme ultraviolet X-ray Ultraviolet Free-electron laser Laser Electromagnetic radiation Physics Radiation
128	ESS & LU Faculty of Science Seminar series on New Science Research Opportunities with MAXIV and ESS The Quintessence of X-Ray Microscopy Add to Reading List Source URL: www.europeanspallationsource.se Language: English - Date: 2013-08-27 07:59:11 Electromagnetic spectrum Microscopes Extreme ultraviolet lithography X-ray microscope Extreme ultraviolet X-ray Ultraviolet Free-electron laser Laser Electromagnetic radiation Physics Radiation
129	PDF Document Add to Reading List Source URL: msu.euramet.org Language: English - Date: 2014-06-13 13:04:50 Science Ellipsometry Dimensional metrology Nanometrology Extreme ultraviolet lithography SPIE International System of Units Measurement Metrology Optics
130	This is an emulation of Solar Physics ••• ••• – •••, •••• The authoritative version is DOI: [removed]s11207[removed]s11207[removed]EUV Spectra of the Full Solar Disk: Analysis and Results of Add to Reading List Source URL: chips.ssl.berkeley.edu Language: English - Date: 2011-07-12 17:42:42 Science Observational astronomy Plasma physics Light sources Space plasmas Extreme ultraviolet lithography Astronomical spectroscopy Solar variation TRACE Physics Spectroscopy Electromagnetic radiation

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